Residual Gas Analyzer (RGA)

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Residual Gas Analyzer

XT100, XT200, XT300 Residual Gas Analyzer Includes built-in ion and pirani gauges

The XT residual gas analyzer (RGA) from Extorr offers exceptional performance and value.

These RGAs provide a more detailed vacuum gas analysis than is offered by any other single

competitive device. Each system comes complete with a multi-gauged quadrupole probe, a

control and communications unit (CCU), and a real-time Windows® software package.

◆ Residual Gas Analyzer with Integrated Pirani and Ion Gauge

◆ 100, 200 and 300 amu systems

◆ Faraday Detector with optional Electron Multiplier

◆ Real-time Windows® software capable of Multi-head operation

◆ Field Replaceable Dual Thoriated Iridium Filaments

◆ Better than 1 amu resolution

◆ 8 orders of magnitude dynamic range in a single scan

◆ Mass spectra, leak detection and pressure vs. time modes

◆ Built in Diagnostics, Easily upgradeable Software and Firmware

◆ Fully Insertable Probe

Operational	Technical Specification
Mass range
XT100, XT100M	1 to 100 amu
XT200, XT200M	1 to 200 amu
XT300, XT300M	1 to 300 amu
Mass filter type	Quadrupole
Resolution	Greater than 1 amu @ 10% peak height, adjustable
Operating pressure	Atmosphere to UHV ( ion gauge operation below 10^-2torr, RGA operation below 10^-3 torr and Multiplier operation below 10^-6 torr)
Partial Pressure Detector type	Faraday cup
Partial Pressure Sensitivity (A/Torr)	5x10^-4 into Faraday cup. Measured with N₂ @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and 2 mA electron emission current.
Minimum detectable partial pressure	5x10^-14 torr with Multiplier. Measured with N₂ @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission current. 10^-11 torr with Faraday cup.
Total Pressure Detector type >10^-3 Torr	Pirani type, (measures heat loss from noble metal wire)
Total Pressure Detector type <10^-3 Torr	Bayard/Alpert type ion gauge, x-ray limit 10^-9
CCU Max. operating temperature	70°C
CCU temperature sensor	solid state sensor in CCU, temperature continuously monitored and displayed
Bakeout temperature	350°C (without CCU)
Probe operating temperature	100°C, Platinum RTD on probe, temperature continuously monitored and displayed
Ionizer Design	Open ion source , electron impact ionization.
Probe Materials	SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel
Filament	Dual Thoriated Iridium with firmware protection.
Degas	Built-in 1 to 30 W ramp-up.
Electron energy	10 to 150 V, continuously programmable
Ion energy	3 to 10 V, continuously programmable
Electron emission current	0.1 to 5 mA, continuously programmable
Probe mounting	Minimum tube I.D. 1.375" flange 2.75" CF
CCU dimensions	3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout
Mass stability	±0.1 amu after 30 minutes warmup.
Computer interface	RS-232C, 9600 - 115,200 Baud
Software	Windows® 2000, XP based application.
Power requirement	24 VDC @ 2.1 Amps. Standard 120 VAC adapter supplied.
Weight	5 lbs.

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